半固着磨具特性对其磨耗和工件材料去除的影响(英文)

Influences of Semi-Fixed Abrasive Tool Characteristics on Tool Wear and Material Removal in Processing

为获得先进陶瓷材料的高效、高精度加工,通过采用新研制的半固着磨具来实现一种半固着磨粒加工技术.制作了以SiC为磨料的不同粒度和磨料浓度的半固着磨具(SFAT),讨论分析了磨料粒度和磨料浓度对半固着磨具特性(剪切强度和表面硬度等)的影响.采用所制作的半固着磨具加工单晶硅片,研究半固着磨具的磨耗率和工件材料去除率.初步实验结果表明,磨料粒度#1000和磨料质量分数为65%的半固着磨具的磨具磨耗率最小且工件材料去除率最大.实验结果有助于指导半固着磨具制作.

To achieve the components of the highest quality in terms of shape, dimension and surface in- tegrity and high efficiency in the course of processing advanced ceramics, the concept of semi-fixed abra- sive machining, which employs a newly developed semi-fixed abrasive tool （SFAT） as machining tool was put forward. The manufacturing process of the SFAT was introduced. A series of SFAT made of SiC abrasive was used in this study. Shear strength and surface hardness of SFAT were investigated. Silicon wafers were taken as workpieces. Material removal rate of workpieces and SFAT wear in processing were discussed. Comparatively, with grit number #1000 and mass fraction 65% of SFAT, SFAT wear was mini- mum and material removal rate was maximum. This result can illumine to manufacture SFAT and instruct semi-fixed abrasive machining.