摘要
近年来 ,物理气相沉积技术的应用对象不断扩展 ,处理时基体温度进一步降低 ,新型镀层、复合镀层、多层镀层大量出现 ,并通过制备工艺提高摩擦学性能。作者对其发展趋势进行了探讨。
The application of PVD is unceasingly spread in the recent years. The temperature of substrate further drops, and the new composite coatings and multilayered coatings are being developed. The developing trend is also discussed by the authors.
出处
《材料保护》
CAS
CSCD
北大核心
2000年第1期91-94,共4页
Materials Protection
