0.12μm至1.2μm振动测量技术研究

Electronic Speckle Pattern Interferometry for Vibration Measurement

采用电子散斑时间平均法振动测量原理，通过Ｂｅｓｓｅｌ 函数的余弦近似和对参考振动的振动相位和振幅的控制，并实施三步相移，从而实现了振幅的定量计算，使得振幅在０ ．１２ μｍ 至１ ．２ μｍ间的振动精确定量测量成为可能，其测量精度较云纹估算法有很大提高．该系统具有全场、非接触、测量速度快、测量精度高等优点．

A phase shifting vibration measurement system is presented on nanometer range. By controlling the phase and the amplitude of the reference vibration, the amplitude and phase of the vibration of the object can be calculated. The resolution of the amplitude is about 5 nanometer. The system has high acuuracy, high speed, full field coverage and low cost.