加载控制模式对电沉积镍薄膜力学性能测试的影响

The effect of control modules in determining mechanical properties of electrodeposited nickel films by indentation

为研究深度和载荷2种加载控制模式对样品硬度和杨氏模量测试结果的影响,选取了厚度为6μm的电沉积镍薄膜为样品,采用美国Hysitron公司生产的TriboIndenter型压痕仪进行压痕试验.结果表明:因薄膜和基底2种材料的性能相差较大,随着压痕深度的增加,基底效应越来越明显;载荷控制模式下所测的硬度和杨氏模量较深度控制模式的都要大,且两性能参数中因应力松弛效应的影响硬度差别更为明显.

Under displacement and load control modules, indentation tests were performed, which on the 6 μm electrodeposited nickel films, to study the effect of control module in determining the hardness and Young＇ s modulus. The results indicate that the substrate effect becomes obvious with increasing indentation depth, both the hardness and Young＇ s modulus tested under load control module are bigger than that under displacement control module, and the hardness is of bigger change than the Young＇ s modulus because of the stress relaxation.