集成阻抗识别的介电泳芯片设计及其关键工艺

Design of Dielectrophoretic Chip Integrated with Impedance Identification and Critical Problems on Fabrication

以微粒的阻抗识别为目的,设计出一种三维网格阵列微电极传感器。传感器将介电泳分离与阻抗识别集成在同一芯片上。首先通过介电泳将微粒中的一种分离至测试区域,再通过阻抗信号描述微粒特性。针对芯片关键区域,提出了调节SU8曝光时间以提高阻抗测试有效信号的工艺解决方案。实验表明,SU8最佳曝光时间为70 s.对芯片性能的相关实验表明,芯片可对不同直径的乳胶微粒进行介电泳分离与阻抗识别。

In order to identificate particles by impedance, the design of a three-dimensional grid electrode array sensor was presented. The sensor integrated the dielectrophoretic separation and impedance identification. The characteristic of the particulates was incarnated by the impedance. The particles were characterized by impedance after they were separated to the test area by dielectrophoresis. For the key area of the sensor, the time of SU8 exposure was adjust to improve the efficient signal in impedance test. The experiments show that the best time of exposure is 70 s. The latexes with different diameter could be separated by dielectrophoresis and identificated by impedance.