基于微波反射光电导法的硅材料少子寿命的研究及系统构建

Measuring Method byμ-PCD Established on Minority Carriers in Silicon

本文基于微波光电导法的测量原理,从单晶硅材料中的电导率和少数载流子浓度的关系着手,提出了一个基于激光—微波双辐射源的硅材料非平衡少数载流子寿命测量系统,介绍了系统结构与工作原理,讨论了系统中各模块功能及其实现原理,完成了模块的理论分析与设计。初步实验表明:设计方案具有可行性。

On the basis of theories of Microwave Photoconductivity Decay （μ-PCD）, The paper introduces the system structure and working principle of the new design, and discusses the performance and realization principles of each module, which the theoretical analysis and design of each module are done. The preliminary experiment of the system shows the feasibility of the new design system.