摘要
文章详细介绍了薄膜材料制备的各种方法,包括真空蒸发法、真空溅射法、脉冲激光沉积法、分子束外延法、化学气相沉积法、化学浴沉积法、电沉积法、溶胶一凝胶法、连续离子层吸附与反应法、分子自组装技术法、模板合成法、溶剂热法。
In the work,various film materials and their preparation methods have been introduced detailly,including: Vacuum evaporation,Vacuum sputtering,Pulsed laser deposition,Molecular beam epitaxy,Chemical vapor deposition,Chemical bath deposition,Electrodeposition,Sol-gel method,Successive ion layer adsorption and reaction,Molecular Self-assembly,emplate Synthesis,Solvothermal Method.
出处
《广东化工》
CAS
2012年第1期77-77,92,共2页
Guangdong Chemical Industry
关键词
薄膜材料
制备方法
film materials
preparation methods