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薄膜材料的制备方法 被引量:2

Preparation Methods for Film Materials
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摘要 文章详细介绍了薄膜材料制备的各种方法,包括真空蒸发法、真空溅射法、脉冲激光沉积法、分子束外延法、化学气相沉积法、化学浴沉积法、电沉积法、溶胶一凝胶法、连续离子层吸附与反应法、分子自组装技术法、模板合成法、溶剂热法。 In the work,various film materials and their preparation methods have been introduced detailly,including: Vacuum evaporation,Vacuum sputtering,Pulsed laser deposition,Molecular beam epitaxy,Chemical vapor deposition,Chemical bath deposition,Electrodeposition,Sol-gel method,Successive ion layer adsorption and reaction,Molecular Self-assembly,emplate Synthesis,Solvothermal Method.
作者 张美芳 林飞
出处 《广东化工》 CAS 2012年第1期77-77,92,共2页 Guangdong Chemical Industry
关键词 薄膜材料 制备方法 film materials preparation methods
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