微纳制造技术文献计量分析

Bibliometrics analysis on the micro and nano manufacturing technology

对微纳制造技术领域2000-2010年时间段的SCI和EI文献计量分析,结果显示,近年来该领域的研究呈现出增长趋势,美国在微纳制造领域的研究处于绝对领先的地位。SCI文献分析表明,纳米尺度的制造技术、微米尺度的制造技术、微机电系统、微流体、微加工等是近年来研究的热点领域;EI分析则显示,光刻技术、微加工、微机电器件、纳米结构材料、扫描电子显微镜等是研究的热点。

In this paper, the SCI and E1 bibleometrics analysis showed increasing current in the micro and nano manufacturing technologies fields. The investigation of United States is leading in this field. By SCI bibliometrics, the focus points lie on manufacturing technologies at nano level, manufacturing technologies at micro level, MEMS, micro fluidics and micromachining. Meanwhile, by EI bibliometrics, lithography, micro machining, micro electromechanical devices, nano-structured materials and scanning electron microscopy are focus points.