摘要
基于有限元方法,以三点夹持为例,对压电薄膜变形镜(PFDM)的工作特性进行了仿真分析,发现变形镜与镜框之间因夹持带来的接触应力会导致镜面变形与电压之间呈现非线性变化。针对这一问题,提出了两种改进方式,仿真结果表明,两种改进方式均能够有效改善变形镜的非线性响应问题。
Based on finite element method, simulation about the property of piezoelectricity film deformable mirror （PFDM） under three-point position-setting is done. The results show that the contact between mirror and frame can cause nonlinear response. For solving this problem, two methods are proposed. Simulation results show that both of them can weaken the nonlinear response.
出处
《激光与光电子学进展》
CSCD
北大核心
2012年第1期124-128,共5页
Laser & Optoelectronics Progress
关键词
自适应光学
压电薄膜变形镜
夹持方式
有限元方法
adaptive optics
piezoelectricity film deformable mirror
position-setting manner
finite element method
