时栅位移传感器的误差分离与补偿方法研究

Research on Error Separation and Compensation for Time-grating Angular Displacement Sensor

为进一步提高时栅角位移测量系统的测量精度,降低生产成本和生产时间,根据时栅传感器的误差组成和误差特性,提出了一种新的误差补偿方法;同时建立了基于傅里叶函数的误差分离模型。该补偿方法将沿空间正弦分布的非线性误差转化成线性误差,并运用最小二乘法理论对系统的误差进行补偿。通过试验与测试证明,采用该方法进行误差补偿可以大幅度提高时栅角位移测量系统的测量精度。

To further improve measurement accuracy of the time-grating angular displacement measuring system,and reduce the production cost and time,in accordance with the error composition and error characteristic of the time-grating sensor,the new error compensation method and error separation model based on Fourier function are proposed.With this method,the non-linear errors in spatial sine distribution are converted into linear errors,and the systematic errors are compensated by adopting the least square method.Through experiment and test,it is verified that this method can compensate the errors,and greatly enhances the measurement accuracy of the time-grating angular displacement measuring system.