0Cr18Ni9不锈钢箔的飞秒激光烧蚀

Ablation of 0Cr18Ni9 stainless steel films by femtosecond laser

利用飞秒激光对厚度为20μm的0Cr18Ni9不锈钢箔进行了表面烧蚀、微细切割等试验,并研究了不锈钢箔的烧蚀特性。首先,根据烧蚀区域的直径和脉冲能量的关系,得到了0Cr18Ni9不锈钢箔的单脉冲烧蚀阈值,并估算了飞秒激光的束腰半径。然后,对飞秒激光切割不锈钢箔的边缘进行金相观察并测试了切割试件的电阻率,以确定飞秒激光切割对不锈钢箔的热影响。最后,对切割试件进行X射线衍射分析(XRD),以确定飞秒激光切割对不锈钢箔物相组成的影响。实验结果表明:飞秒激光的束腰半径为10.416μm;厚度为20μm的0Cr18Ni9不锈钢箔的单脉冲烧蚀阈值为0.455J/cm2;飞秒激光切割后试件的金相组织处于回复阶段,因此金相组织不会产生明显变化;飞秒激光切割后不锈钢箔的物相组成没有变化,但物相的相对含量发生了改变。

The 0Cr18Ni9 stainless steel film with a thickness of 20 μm was ablated and cut in a micro-machining. Firstly, the ablation threshold of 0Cr18Ni9 stainless steel film and the beam waist radius of a femtosecond laser were obtained based on the functional relationship between ablation area and laser energy. Then, the metallographic phase and electrical resistivity of the stainless steel film ablated by the femtosecond laser were researched in detail to observe the heat effect caused by the laser. Finally, in order to research the effect of femtosecond laser ablation on the phase composition of the stainless steel film, specimens were tested by X-ray Diffractometry（XRD）. Experimental results demonstrate that the waist radius of femtosecond laser is 10.416 μm and the ablation threshold of the stainless steel film with a thickness of 20 μm is 0.455 J/cm2. The metallographic phase of specimens cut by the femtosecond laser is in a recovery process, and its metallographic phase is not changed. The phase composition of stainless steel film is not affected by the femtosecond laser cut, however, the content of phase has been changed.