单点金刚石机床及其在光学工程领域的应用

Single point diamond machines and their applications to optical engineering

介绍了单点金刚石车床概念,总结回顾了单点金刚石车床在国防和商业领域内的发展状况,给出了目前商用单点金刚石车床的典型产品。对单点金刚石车床的关键零部件和核心技术,如空气静压主轴、液压导轨、直流电机、对刀装置、误差补偿和自适应控制等进行了分析。最后,介绍了适宜单点金刚石车削加工的材料,分析了快刀伺服和慢刀伺服在光学元件中的应用以及所加工的光学元件在国防和商用光电产品中的应用,并以主次镜望远镜系统和精密光学系统无调整装配为例,说明了单点金刚石车削在光电产品中的重要作用。

This paper overviews the development of the single diamond machines used in weapons and commercial fields,and introduces nowadays widely-used commercial ultra-precision diamond turning machines.Then,it analyzes the key techniques to achieve nanometer-level precision machining,such as air bearing work spindles,oil hydrostatic bearing X/Z slides,work piece measurement error compensation,optical tool setters,Linear Variable Differential Transformer（LVDT） tool setters and adaptive control systems.Finally,it summarizes the materials suitable for diamond turning,and introduces the fast tool servo and slow slide servo used in the manufacturing of opto-mechanical components.By taking drop-in assembly of a Cassegrain telescope and an fine optical system for examples,this paper shows the important effort of the ultra-precision diamond turning in photoelectric products.