摘要
针对外科手术力觉信息采集对多维力传感器提出的低量程和高分辨率的要求,对常规的十字梁六维力传感器进行结构改进,设计了一种具有滑移结构的低维间耦合的小量程六维力传感器。分析了传感器结构抑制维间耦合的机理,通过有限元方法分析了其受力变形情况。标定实验表明:该六维力传感器非线性误差与维间耦合误差均小于2%,具有高灵敏度、高分辨率和低维间耦合的特点。
Aiming at the demands of low-range and high resolution on multi-D force sensor in force infol^nation acquisition during force sensing surgery, the structure of routine cross 6-D force sensor is improved and a low dimension coupling and small scale 6-D force sensor with glide structure is designed. The mechanism which curb the dimension coupling of sensor structure is analyzed, and stress deformation is analyzed by finite element method. The calibration experiment demonstrates the non-linear error and dimension coupling error of the new sensor are lower than 2 % , which show its characteristic of high sensitivity, high resolution and low-dimensional coupling.
出处
《传感器与微系统》
CSCD
北大核心
2012年第1期20-22,25,共4页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2009AA01Z313)
关键词
六维力传感器
小量程
维间耦合
滑移结构
6-D force sensor
low-range
dimension coupling
glide structure