摘要
开展了对硅基底多层螺旋电感的研究.结合前人提到的提高螺旋电感Q值的方法,提出了将柱形,E形磁芯用于多层螺旋电感,并使用软件Maxwell对其进行仿真分析.结果表明,矩形多层螺旋电感在置入柱形磁芯后,变压器效率有所提高.E形磁芯为磁感线提供了完整回路,效率可在90%以上.还研究了应用MEMS技术制造螺旋电感结构.
This article was based on Inductor and transformer structures put forward by previous people,and carried out the study of multilayer spiral inductors on silicon substrate.It combined with the method of improving spiral inductor＇s Q value,used column and E-shaped core for multilayer spiral inductors creatively,and do simulation and optimization of it respectively with the software of Maxwell.The simulation result showed that the transformer efficiency was improved but not very obvious when rectangular spiral inductor was implanted into cylindrical cores.The E-shaped core provided a complete circuit for magnetic induction lines,and the transformer efficiency was more than 90%.This paper presents a study of manufacture the plan transformer by MEMS technology.
出处
《机械与电子》
2012年第1期7-10,共4页
Machinery & Electronics
关键词
硅基底
螺旋电感
E形磁芯
silicon-based
spiral inductors
E iron core
