介孔硅与大孔硅的结构、电学和气敏特性(英文)

Microstructure,Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

采用双槽电化学腐蚀法在P型单晶硅表面制备两种多孔硅.根据它们的孔径将它们分为介孔硅和大孔硅.使用扫描电子显微镜(SEM)观察两种多孔硅表面和断面形貌,介孔硅和大孔硅的表面化学键用傅里叶变换红外(FTIR)光谱仪来研究,通过I-V特性测试表征两种多孔硅电学特性,随后在室温下测试其气敏特性.结果表明:介孔硅具有较高的气体灵敏度,大孔硅具有较好的气体响应恢复特性.介孔硅对NO2气体具有较好的选择性,大孔硅对NH3气体具有较好的选择性.

Two different kinds of porous silicon （PS） were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon （meso-PS） and macro-porous silicon （macro-PS）. The surface and cross-section morphologies of the PS were observed by scanning electron microscope （SEM）. The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared （FTIR） spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO2, while macro-PS shows better selectivity for NH3.