摘要
文章介绍了利用匀胶机甩Teflon薄膜作为疏水亲油介质的方法制备电润湿显示的工艺,在此基础上,通过引入光刻工艺,选用SU-8负胶作为光刻胶,获得了具有良好的油滴浸润性的电润湿显示阵列。实验中获得的显示阵列具有良好的油滴浸润性,油滴在各个显示单元上覆盖全面,小电压时就开始收缩,电压加到30V时,油滴基本上收缩到角落,并且有良好的重复性,有望应用于下一代的显示器件。
In this paper, we described the process of fabricating the electrowetting display, using teflon films thrown by a spin coater as the lipophilic hydrophobic medium. On this basis, by employing SU-8 photoresist as the lithophotography cofferdam, we got the electrowetting display array with good oil invasion. The oil droplets achieved complete coverage in every display units, began to shrink at small voltage, and when the voltage was 30V, shrank virtually into corners. These properties of the process, plus a good repeatability, make its application in the next generation of display devices promising.
出处
《现代显示》
2012年第1期23-27,共5页
Advanced Display
关键词
电润湿
光刻
聚四氟乙烯
electrowetting
lithophotography
teflon
