非等齿耦合位移传感器的研究

Research of coupling displacement sensor with unequal-tooth

为了提高位移传感器的测量精度,在最大开槽数一定时获得更多的极对数。对原有时栅位移传感器进行改进,提出了一种新的位移传感器结构,介绍了传感器的工作原理和结构。该传感器在最大开槽数一定的情况下,可以得到较多的极对数和测头数,从而利于提高测量精度。通过实验得出以高精度光栅为基准时传感器的角位移测量误差为±6.5″。

To improve the measurement precision of the displacement sensor,increase the pole-pair number under the same max tooth number. On the basis of analyzing time grating displacement sensors, a new design of the displacement sensor is proposed. The working theory and the structure of the new displacement sensor are introduced. To get some number of notches, this sensor can get more pole-pair number than other sensors, so it＇ s good for improving the measurement precision. The experiment based on grating with high precision is carried out, the measurement error of the sensor is ±6.5＂.