硅烷法制多晶硅生产过程的火灾危险性分析

Fire danger analysis of polysilicon production process by silane method

介绍硅烷法制多晶硅的生产工艺及生产过程,分析生产过程中的主要危险品的理化性质。从厂区布局、电气设备、报警系统、灭火系统等方面提出硅烷法制多晶硅生产过程中应注意的消防安全技术措施。

The production process of polysilicon by silane method was introduced and the physical and chemical characteristic of main dangerous goods during the production was analyzed. The fire safety measures of polysilicon production were put forward from the aspects of plant layout, electrical equipment, fire alarm system, fire extinguishing system, etc.