摘要
低真空模式是扫描电镜的一种新型观测模式,它的最大特点是可以对不导电样品直接进行观察。这样既避免了不导电样品表面由于电荷累积产生的假象,又省去了对样品表面进行导电喷镀,还有利于不导电样品其他信息的检测与分析。此外,扫描电镜低真空模式还可以对低致密度或多孔样品进行直接观察,这是高真空模式无法取代的。
Low vacuum mode is a late-model kind of observing pattern for SEM.Its biggest characteristic is direct observation of non-conductive samples.In such a way,either the pseudo image caused by electric charge accumulation on the surface of non-conductive samples was avoided or the conductive coating on the surface of the samples was saved.Moreover,it facilitates testing and analysis of other information of the non-conductive sample.In addition,low vacuum mode is carried out on the samples that are not tight for direct observation,which is no substitute for high vacuum.
出处
《理化检验（物理分册）》
CAS
2011年第12期786-789,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
