摘要
提出相移数字全息中以子图拼接扩大等效芯片尺寸来提高分辨率的方法。使用相关方法拼接了相移数字全息中4幅子图,扩大了记录范围,提高了成像分辨率。以4条5μm宽的狭缝为实验物体进行了模拟实验。结果表明,孔径合成技术能够明显提高系统成像分辨率,经孔径合成后分辨宽度达到5μm。
A method to enlarge the size of recording chip by stitching sub interferograms in phase shifting interferometry is suggested.4 interferograms recorded on the same objective plane are combined to enlarge the recording area and improve the imaging resolution.As the object four 5 μm slims are used in the simulative experiment.The results show that this aperture synthesis method can improve the imaging resolution obviously and the resolution can be improved to 5 μm after aperture synthesis.
出处
《科学技术与工程》
2011年第36期8978-8980,8992,共4页
Science Technology and Engineering
基金
山东省自然科学基金(ZR2009GM016)
中央高校基本科研业务费专项资金(09CX04002A
10CX03007A)资助
关键词
相移数字全息
孔径合成
相关方法
phase shifting interferometry aperture synthesis correlation mehtod