摘要
单晶炉是生产单晶硅的核心设备,其控制系统分析模型的建立有两种方法。一是以单晶直径外形尺寸为目标建立模型;二是以电气控制系统变量为目标建立模型。两种方法均未考虑到单晶生长工艺影响与单晶工艺指标。提出一种以固液交界面热场动态平衡分析为基础的方法,建立单晶炉控制系统变量分析模型,并据此辅以直径形状控制变量的工艺性制约因素考虑,采用工业以太网技术构成全自动网络单晶炉系统设计方案。
Single crystal furnace is a core equipment for production single-crystal silicon.there are two methods to establish analysis model of the control system.one is based on diameter dimensions of single crystal,the other is based on variables of electrical control system.Both methods were not considered the effect of the crystal growth process and crystal technology indicators.In this thesis,it is proposed to establish a variable analysis model of single-crystal furnace controlling system based on thermal field dynamic balance of solid-liquid interface,hereby take account of the constraints of diameter controlling variable＇s technics,and use industry enternet technology to construct fully antomatic network single crystal furnace＇s design.
出处
《电子工业专用设备》
2011年第12期1-4,14,共5页
Equipment for Electronic Products Manufacturing
关键词
单晶炉
固液交界面
设计
模型
Single-crystal Furnace
solid-liquid interface
design： model
