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全自动单晶炉控制系统方案设计 被引量:1

Automatic Crystal Growth Equipment Control System Design
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摘要 利用通用可编程控制器(PLC)、结合倍福(Beckhoff)智能端子作为控制和信号处理核心,以大尺寸触摸屏构成友好的人机界面。选用先进CCD测量元件及辅助液面测温等,通过工业现场总线加以太网完成整个系统的通讯及控制。 This design approach: using of general-purpose programmable logic controller(PLC),controlling and signal processing core by Beckhoff intelligent terminals,forming large-size touch screen friendly interface.carefully selecting advanced CCD measurement components and auxiliary surface temperature,etc.,completed of communication and control system through industrial field bus and Ethernet.
作者 王庆 张婷曼
出处 《电子工业专用设备》 2011年第12期5-8,11,共5页 Equipment for Electronic Products Manufacturing
基金 国家科技重大专项 "极大规模集成电路制造设备及成套工艺"(2009ZX02011)
关键词 单晶炉控制系统 可编程控制器(PLC) 倍福(Beckhoff)智能端子 single crystal furnace control system Programmable logic controller(PLC) Beckhoff telligent terminals
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