KZC—磁控溅射镀膜机电源的研究

Study on the Power Supply of Magnetron Sputtering Coater-KZC

本文介绍KZC—磁控溅射镀膜机电源的组成，工作原理和具有自动起动功能及抑 制系统振荡的良好动态特性。文中详述了“自适应电流调节器”、“电流截止负反馈”、 “触发电路”、“给定积分器和电压调节器”。该电源为磁控溅射镀膜设备实现自动控制 提供了方便。

In this paper, the power supply composition of the magnetron sputtering coater-KZC, operation principle and the better dynamics performance, automatical start and suppression of the system vibration are introduced. Here describe the adaptive current regulator, negative feed-back for current cut-off, trigger circuit, given integrator and voltage regulator in detail. The power supply will be convenient for controlling the magnetron sputtering coater automatically.