多弧离子镀膜机靶源电磁场的研究

The Calculation of Magnetic Field intensity Produced by Electromagnet Coil on Target of Multi-arc Equipment

多弧离子镀设备蒸发源的电弧放电受外加磁场的严格控制，靶面处不同的磁场分布 具有不同的电弧放电形貌，这样，靶面处磁场强度的计算显得特别重要。本文基于多年 科研实践和研究生论文试验对电磁线圈在靶面各处产生的磁场强度的计算进行了理论推 导和研究，建立了数学模型，并进行了比较精确的磁场计算。计算值与实测值较好地相 吻合。该计算可作为多弧靶设计的依据。

The arc-discharge for multi-arc ion coating equipment is strictly controlled by magnetic field, the form is different according to different magnetic field distribution on the target surface. So the calculation of magnetic field intensity on the target surface is quite important.This paper conducts the theory study for calculation of magnetic field intensity produced by electromagnet coil on target surface and sets up related mathematic model.By this model, the valve of calculation is quite in conformity with that obtained from experiment.The calculated results obtained by the model can be considered as an important basis for design of multi-arc target.