摘要
为满足微电子学、光电子学、超导电子学等获得超高清洁真空的需要而研制了３Ｌ－ ２２０型溅射离子泵．该泵体积小，容积利用率高．采用了两种不同直径的阳极简组合的 三极结构型式等一系列措施。极限压力低、抽气压力范围宽，对氩气抽速较高。 文中论述了泵的方案选择、主要结构设计，泵性能测试及其结果分析．
In order to obtain the requirement of clear UHV in the respects of microelectrics, photoelectrics and superconduting electrics, the sputtering ion pumping 3L-220 is developed. Small volume, high utilization coefficent. A serious methods are used e. g triode structure which is composited of two kinds of anode cylinder with different diameter. Low ultimate pressure, high pumping speed for Ar. In this paper, the selection principles of pump, design of main structure, the performance measurement and result analysis etc are described.
出处
《真空》
CAS
北大核心
1990年第4期24-30,共7页
Vacuum
