摘要
针对大口径光学器件在抛光加工过程中子孔径拼接检测效率低的问题,提出并分析了用稀疏子孔径采样法对大口径光学器件抛光加工过程进行过程检测。通过软件仿真分析稀疏子孔径不同的采样分布,并拟合出不同采样分布的全口径面形,与实际测得全口径面形进行比较。结果表明:当稀疏子孔径采样分布合理时,稀疏子孔径采样检测法检测出的全口径面形与实际测量的全口径面形相当,所以稀疏子孔径采样检测法可以在抛光过程中进行检测,从而提高检测效率。
Due to the low efficiency of testing large-aperture mirrors in the polishing process by sub-aperture stitching technology,the sparse sub-aperture sampling technology was put forward and analyzed.Full aperture maps gained by different sparse sub-aperture sampling and the actual full aperture map were compared.The sparse sub-aperture sampling with a reasonable distribution may achieve the same accuracy as the full aperture test does.Thus the sparse sub-aperture sampling technology could be used in the polishing process to improve test efficiency.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2011年第12期3193-3196,共4页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(60908042)
关键词
光学检测
大口径镜面
稀疏子孔径
采样
抛光
optical test
large-aperture mirror
sparse sub-aperture
sampling
polishing
