摘要
研究了块体金属玻璃(块体非晶合金)Zr65Al7.5Ni10Cu17.5,Co61.2B26.2Si7.8Ta4.8和金属多晶钼3种第一镜材料经低温等离子体H和Ar辐照后的表面特性变化。结果表明,两种块体金属玻璃的抗H等离子体溅射能力与其成分有关。随着等离子体辐照时间的增加,金属多晶钼和块体金属玻璃Zr65Al7.5Ni10Cu17.5的表面粗糙度增大,镜面反射率降低;而块体金属玻璃Co61.2B26.2Si7.8Ta4.8的表面粗糙度减小,镜面反射率升高。X射线衍射仪(XRD)分析表明,块体金属玻璃在离子体溅射过程中,表面微结构具有自修复性。
Surface characteristics of mirrors made from polycrystalline Mo,bulk metallic glasses(BMGs) Zr65Al7.5Ni10Cu17.5 and Co61.2B26.2Si7.8Ta4.8 were studied.The mirrors were exposed to H plasma in an unbalanced magnetron sputtering chamber.The results show that with increasing the H plasma sputtering time,surface roughnesses of the mirrors made from polycrystalline Mo and BMG Zr65Al7.5Ni10Cu17.5 increase and their specular reflectivities decrease;whereas the surface roughness reduces and the reflectivity increases for the mirror made from BMG Co61.2B26.2Si7.8Ta4.8.During H plasma sputtering,the surface state of BMGs can self-repair.Taking into account the evolution of optical properties after sputtering,amorphous metal Co61.2B26.2Si7.8Ta4.8 can best withstand the erosion conditions and preserve its optical properties.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2011年第12期3329-3332,共4页
High Power Laser and Particle Beams
基金
辽宁省高等学校创新团队支持计划(2009T013)
国家重大基础研究计划资助课题
关键词
第一镜
块体金属玻璃
聚变堆
等离子体溅射
镜面反射率
first mirror
bulk metallic glasses
fusion reactor
plasma sputtering
specular reflectivity