AlN薄膜对太阳能吸收率的研究

RESEARCH ON AlN THIN FILM FOR SOLAR ABSORPTANCE

采用磁控溅射方法,在高纯氩气和氮气混合气氛下成功制备出Al(W)-AlN系太阳能选择性吸收薄膜。借助吸收光谱分析,比较了Al、W两种反射层材料上制备单层AlN和多层AlN薄膜的光谱吸收特性。结果表明:多层AlN薄膜比单层AlN薄膜的吸收性能好;W比Al更适合做反射面材料,W-渐变型多层AlN膜系对太阳能的吸收率可达到80%以上。

A1 （W）-A1N selective absorption thin films have been successfully synthesized using magnetron sputte- ring technique under a mixed gas of high-purity nitrogen and argon. The optical absorption characteristics of single- layer or multi-layer A1N thin films on the W and A1 reflecting layer were compared through the analysis of the ab- sorption spectra. The results indicated that the absorptance of the multi-layer A1N thin films is better than that of the single-layer, and W layer was more suitable to be used as reflecting material than A1 layer. The solar absorp- tance of the gradual change multi-layer A1N thin film on the W reflecting layer at full-wave band of solar spectra can be over 80%.