改进微静电马达的摩擦与磨损

Improvment of the Friction and Wear of Micromotors

】在微观结构中,摩擦及磨损严重地影响着部件的力学性能和可靠性。不同材料的摩擦系数相差很大,多晶硅和多晶硅之间的静摩擦系数约4.9,多晶硅和单晶硅之间的静摩擦系数约0.48～0.28、动摩擦系数约0.35～0.20,材料表面的粗糙度对摩擦系数影响也很大。鉴于此,提出了一种单晶硅台面结构晃动微马达,取代多晶硅表面微机械工艺制作的多晶硅法兰盘。它具有机械强度高、摩擦系数小、抗磨损、不塌陷等优点。马达的轴也加工成实心轴,克服了轴因磨损和受力而变形的问题。使得马达的寿命大大提高。摩擦力减少,马达性能改善。

Friction and wear effect on mechanical features and reliability of parts in microscope. There are distinctive friction coefficient different materials between both. The friction coefficient of polysilicon on polysilicon is about 4.9. The friction coefficient of polysilicon on single crystal silicon is about 0.48 .The former is one order of magnitude larger than the later. A single crystal silicon mesa flange incorporated with substrate o f micromotor is proposed instead of polysilicon flange suspension. The mesa flange motor has higher strength, smaller frictional coefficient, and wears resistance and solid in structure. The lifetime of the micromotor has been improved. A solid axle is used in the mesa flange bearing micromotor instead of a hollow-center axle in the salient flange micromotor, so that the deformation of axle from wear and force suffered are eliminated. The friction and wear of the motor is improved, so that the lifetime of the motor is longed.