在扫描电子显微镜中原位操纵、加工和测量纳米结构

In-situ manipulating,fabricating and measuring nanostructures inside SEM

在电子显微镜中对纳米材料和纳米结构进行原位测量是了解纳米材料的结构与性能关系的最重要手段,并且,在电子显微镜中操纵和加工纳米材料与纳米结构还可研究新结构和新器件。由于扫描电镜有大的样品室、可较容易地引入多个多种测量和操纵探针、并可配备多种探测器从多个角度对同一个样品进行表征,使得扫描电镜中的原位研究在纳米材料和纳米器件研究方面有独特的应用。本文重点回顾作者近年来在扫描电镜中原位研究方面的一些工作进展。主要包括一系列原位操纵、加工和测量方法的发展,及对碳纳米管的力学和电学特性的研究。

In-situ measuring nanomaterials and nanostructures inside electron microscopes is one of the most important methods to understand the relationship between structure and property of nanomaterials.Furthermore,manipulating and fabricating nanomaterials and nanostructures inside electron microscopes also enable studies of new structures and new devices.Because scanning electron microscope（SEM） has large sample chamber,can easily hold multi probes and various kinds of probes for measurements and manipulations,can host multi detectors so that can characterize the same sample from different point of view,in-situ study in SEM has special applications in the study of nanomaterials and nanodevices.This review focuses on the progresses made in our laboratory in in-situ SEM in the recent years,including mainly the developments of in-situ methods of manipulation,fabrication and measurement,and the studies on the mechanical and electronic properties of carbon nanotubes.