制备GaN基材料的数值模拟研究进展

Research Progress in the Numerical Simulation to the Manufacturing of GaN-based Materials

综述了紫外探测器的实际应用,特别介绍了紫外预警系统的作用原理;详细介绍了GaN基材料及其生长方法;对MOCVD法制备GaN基材料的过程做了详细描述,特别介绍了国内外MOCVD系统制备GaN基材料的数值模拟方法。

This paper reviews the practical application of ultraviolet photodetectors, especially introduces the working principle of ultraviolet warning systems. The GaN-based materials and their growth and doping methods as well as the process to manufacture GaN-based materials by the MOCVD method are described in detail. In particular, the numerical simulation methods to simulate the manufacturing of GaN-based materials by MOCVD systems in China and overseas are introduced.