利用AFM机械刻划的切屑形成试验

Study of Nano-mechanical Characterization of Chip Formation Using Atomic Force Microscopy

切屑的形成和对切屑产生影响的因素是机械加工中的一项重要研究内容。基于原子力显微镜AFM的机械刻划加工方法,对超精密加工中切屑的形成、形貌的影响因素的研究具有重要意义。通过阐述原子力显微镜的工作原理及针尖刻划过程,应用纳米压痕理论对基于AFM的机械刻划加工机理、切屑形成过程进行分析。随后通过变化不同参数如进给量、刻划速度、垂直载荷和不同进给方向等进行刻划试验,通过扫描电镜对刻划后试件形成切屑进行观察。通过实验结果,分析各种参数对切屑的形成、形貌的影响和变化规律。

Research on chip formation and its influencing factors is an important contents in the field of mechanical machining research.The method of mechanical characterization based on AFM has the vital significance for the study of the form of ultra-precision processing chip,and the influencing factors of the morphology.Through the elaboration of atomic force microscope＇s principle and the tip skinned process,it has analyed the theory of mechanical characterrization processing based on AFM and the scraps forming process,using application of nano creasing theory.Whereafter,the experiment research on scratching with different parameters,such as feed rate,scratching speed,vertical load and feed direction,is carried to analyze their influence on chip formation and its morphological characteristics.We can analy the effeacts of the mechanism and morphology by the change rule.