梯度掺杂生长绒面结构ZnO:B-TCO薄膜及其特性研究

Research on textured ZnO:B-TCO thin films grown by gradient-doping technique

采用新的金属有机化学气相淀积(MOCVD)-ZnO镀膜工艺技术-梯度掺杂技术生长绒面结构。研究ZnO:B-TCO薄膜。结果表明,梯度掺杂技术可有效增加薄膜晶粒尺寸和提高光散射作用。并且,梯度掺杂技术有效地提高了薄膜在近红外区域的光学透过率,有利于应用于宽谱域薄膜太阳电池。生长获得的MOCVD-ZnO薄膜,其薄膜电子迁移率为24 cm2/V,电阻率为2.17×10-3Ω.cm,载流子浓度为1.20×1020cm-3,且在小于1 000 nm波长范围内的平均透过率大于85%。

This paper proposes a new MOCVI;ZnO coating technology--gradient doping technology to grow textured ZnO： B-TCO thin films. The results show that the gradient doping technology can increase the film grain size and improve the light scattering effectively. In addition the gradient doping technology can effectively improve the optical transmittance of the ZnO：B thin films in the near irffrared region, which is conducive to be used in wide-spectrum thin film solar cells. The optimized ZnO.B thin film with the mobility of -24 cm2/V, resistivity of ;2.17 × 10-3 Ω ; cm and carrier concentration of ; 1.20 × 10^20 cm-3 is obtained. The total transmittance of optimized ZnO：B thin film is higher than 85; in the umwavelength range lower than 1 000.