摘要
为减少加速器束流快引出元件铁氧体材料真空出气量,对铁氧体材料进行真空除气、镀膜以及烘烤工艺处理。采用旁路切换法(SPP)测量不同处理条件下的出气率。结果表明,铁氧体材料经真空除气后镀TiN膜,在测试罩中经烘烤,冷却后充氮气测得的出气率最低。
As the main material of ion beam extraction component used in accelerator system, ferrite has to be treated to satisfy lower outgassing rate for vacuum up to 10^-7-10^-10 Pa. By the method of switching two pumping paths （SPP）, outgassing properties of ferrite materials, which were treated by normal cleaning, high vacuum degassing and TiN coating, baking after exposing to air or N2, were measured and compared. The results show that all treatments can reduce the outgassing rate, but the TiN-coated sample after degassing and baking, exposing to N2, has the lowest outgassing rate.
出处
《真空》
CAS
2012年第1期21-24,共4页
Vacuum
