数控抛光技术中抛光盘的去除函数

Removing function of polishing pad in computer controlled optical polishing

抛光盘去除函数的确定是数控抛光技术的应用基础，以Ｐｒｅｓｔｏｎ 方程为基础，应用运动学原理推导了抛光盘在行星运动及平转动两种运动方式下的材料去除函数，并通过计算机模拟出相应的工作特性曲线。结果表明，两种运动方式下工作特性曲线均在不同程度上趋近于高斯曲线。因而行星运动及平转动都可作为抛光盘的运动方式应用在ＣＣＯＰ技术中，使加工中的面形误差得到收敛。

The base concept for computer controlled optical polishing (CCOP) is the deciding of material removing function of the subaperture polishing pad. Kinematic principles are applied to deduce the removing function of the polishing pad in conditions of planet motion and translation according to the Preston assumption and the respective performance curves are given to compare by computer simulation. Accoring to the analysis results, both of the two curves tend to Gauss curve in different degree, so planet motion and translation can be applied in CCOP to converge the figure error.