考虑通孔和边缘效应的互连网络热电分析

Thermoelectric Analysis of Interconnect Considering Via and Fringing Effects

考虑互连通孔和边缘效应,建立互连层间、层内、通孔热阻模型,利用热电二元性,提出一种考虑温度效应对热流影响的热电耦合仿真方法,利用热电之间的反馈关系,修正建模后的温度分布对节点网络热流的影响.并对以聚合物和硅氧化物为介质的多层互连进行分析,以有限元建模结果为参照,与已有模型相比,互连热分布结果的相对标准差分别降低了71.2%、12.9%.考虑通孔效应和边缘效应后,该方法在不同纳米级工艺中所得峰值温升,较已有模型均有一定程度的降低.

With consideration of via effect and heat fringing effect, a thermoelectric simulation method is proposed which modifies node heat flow due to temperature distribution. Based on thermoelectric duality, thermal resistance models including inner/inter-layer and vias are presented. Take advantage of feedback relationship between heat and electric, the node network heat flow model is modified with temperature distribution. Multilevel interconnects temperature distribution with polymer and silicon oxide as insulator dielectric are analyzed. Compared with results of finite element, the relative standards deviation of the proposed method can be reduced by 71.2% and 12. 9% respectively than those of available models. With consideration of via effect and heat fringing effect, we calculate peak temperature rise in different technology nodes. It shows that interconnect temperature distribution is overestimated in traditional models.