旋转对称非球面自动加工控制算法研究

The automatic manufacturing algorithm of rotary symmertrical optical aspheric surface

介绍了计算机控制光学表面成型（ＣＣＯＳ） 技术的基本原理，对双旋转磨头的去除函数进行研究，研究了不同形状的磨头的去除函数特性，并在多次实验的基础上得到了最优的加工参数，在去除函数的基础上提出了模板函数的概念及算法。根据加工旋转对称非球面光学表面的特点，结合模板函数提出了一种基于同心圆磨头运动轨迹的控制算法。运用该算法对神光Ⅲ号打靶非球面透镜的一种工艺试样（ Φ３００ｍ ｍ ，Ｆ５－９ ，最大非球面度为４６μｍ） 进行自动加工，面型精度达到１λ（ＲＭＳ，λ＝ ６３２－８ｎｍ），取得了满意的结果。

A method of producing rotary symmetrical optical aspheric surface by CCOS(Computer controlled optical surfacing) is presented. The theoretical removal function of a grinding/polishing tool is given and the optimal technological parameters is achieved by experiments. The conception of template function is proposed. Using this function the tracks programming algorithm is designed and the tool move in spatial concentric circles is made. The grinding process with a big lens Φ 300mm,F5.9 is simulated and the result is quite satisfactory. After 8 hours and 43 minutes of fine grinding, 12 hours of even pro polishing and 5 hours of polishing, the surface error can be reduced to 1 λ (RMS, λ =632 8nm).