电容式测压微型传感器

Capacitive Pressure Microsensor

文中主要介绍一种新型电容式测压微传感器的结构及测量电路。通过对测量电路的理论分析、仿真和实验验证,证明这种微型传感器由于采用独特的结构和测量电路,因而具有良好的线性范围和较高的灵敏度。

This paper introduce the structure and measuring circuit of a new type of capacitive pressure microsensor . Through theoretic analysis,simulations and experiments,it has been proved that this type of microsensor has excellent linearity,ralatively high sensivity and can compensate the temperature error effectively.