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二氧化硅无机薄膜的制备及性能研究 被引量:2

Study on the Preparation and Properties of Silica Inorganic Films
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摘要 采用溶胶-凝胶法,以正硅酸乙酯为原料,不同浓度氨水溶液做催化剂制备了SiO2薄膜,用可见分光光度计,综合热分析仪、X射线粉末衍射等分析手段对薄膜进行表征。研究发现,随氨水浓度的提高,所制备的SiO2薄膜的透光率提高,薄膜与基底的附着力也相应提高。XRD分析结果表明二氧化硅薄膜具有非晶态的无序结构。 Silica films catalyzed by different concentrations of NH3-H2O were prepared with TEOS as main raw material by the sol-gel method.The samples were characterized by visible spectrophotometer,X-ray diffraction(XRD) and thermal analysis technology(TG-DTA).Results showed that the light transmittance and adhesion of silica films were both increased with the increasing of the concentration of NH3-H2O catalyst.The structures of the silica films were non-crystal.
出处 《广东化工》 CAS 2012年第2期29-30,共2页 Guangdong Chemical Industry
基金 烟台大学环境与材料工程学院2010年科技创新基金
关键词 溶胶-凝胶法 正硅酸乙酯 SIO2薄膜 性能 sol-gel method tetraethyl orthosilicate silica film property
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