摘要
介绍了传统热阴极电离规和冷阴极电离规的发展历程和研究现状、新型场发射阴极(微尖型阴极和碳纳米管阴极)在电离规中的应用、小型化电离规的发展和国内在超高/极高真空电离规研究方面取得的成果和现状。重点回顾了碳纳米管阴极电离规和小型化电离规在近年来取得的重大成就。由于碳纳米管具有长径比大、曲率半径小、机械特性强、导电性好和优异的场发射特性,使得其作为电离规阴极有望解决传统冷阴极电离规在低压下不能放电的困难和传统热阴极电离规的热出气效应,从而为极高真空测量提供一种解决途径。
Ionization gauge is the only gauge in ultra high vacuum （UHV） and extremely high vacuum （XHV） measurements. In this paper, the study status of hot cathode ionization gauge and cold cathode ionization gauge are reviewed. Some field emitter cathodes （Spindt cathodes and carbon nanotube field emitters） and the development of miniature ionization gauge are also introduced. In addition, the achievement and the study status of UHV and XHV ionization gauge in China are discussed. The recent development of carbon nanotube field emitters and miniature ionization gauges was reviewed. Carbon nanotube array emitter has attracted most attention due to its high aspect ratio, exceptional mechanical strength, good conductivity and excellent field emission characteristics. Carbon nanotube field emitter ionization gauge is expected to solve the ignition problem of conventional cold cathode gauge in very-low pressure and the outgassing effect of conventional hot cathode ionization gauge, which will provide a solution to extremely high vacuum measurement.
出处
《上海计量测试》
2012年第1期2-10,14,共10页
Shanghai Measurement and Testing
关键词
电离规
热阴极
冷阴极
发射阴极
交叉场
ionization gauge
hot cathode
cold cathode
emitting-cathode
crossed-field
