摘要
针对国内对高灵敏、小体积、造价低的矢量水听器迫切应用需求的现状,提出了一种新型的双"T"型微机电系统(MEMS)矢量水听器。该敏感单元结构可一体化加工,且加工成本低,适合大批量生产,易于阵列化。采用ANSYS仿真,得出1阶共振频率为1 840Hz,压敏电阻位置距离梁根部180μm。对此结构进行声学封装与测试,测试结果表明,该水听器在1kHz的灵敏度达到-175dB,工作频段为100Hz～4kHz,具有良好的"8"指向性。
In view of the urgent demand of high sensitivity,mall volume and inexpensive vector hydrophone in domestic,a novel double T-shaped vector hydrophone is proposed.The structure can be integrated fabricated,which is suit for lot manufacturing and multiple arrays.This paper simulated the novel structure by ANSYS.It could be concluded that resonance frequency was 1 840 Hz and the position of the piezo-resistor was away from edges about 180 m.The prototype of the vector hydrophone was fabricated and preliminary characterization tests of the hydrophone were performed.Results showed that the sensitivity was-175 dB at 1 kHz and frequency response ranged from 100 Hz to 4 kHz,possessing satisfactory directional pattern in the form of ＂8＂ shape.
出处
《压电与声光》
CSCD
北大核心
2012年第1期89-92,共4页
Piezoelectrics & Acoustooptics
基金
国际科技合作基金资助项目(2010DFB10480)
