上海第三代同步辐射装置及其在光刻和LIGA中的应用

The 3rd Generation of Shanghai Synchrotron Radiation Facility and Its Application in Lithography and LIGA

对即将动工的上海第三代同步辐射装置(SSRF)及其主要参数作了介绍。叙述了目前同步辐射x射线光刻和LIGA的一些技术进展情况。

Both the 3rd generation of shanghai synchrotron radiation facility(SSRF)which will be built soon and its main issues are introduced in this paper.Some progress of both synchrotron radiation x ray lithography and LIGA is introduced.The application prospect of SSRF lithography/LIGA station is analyzed briefly.