600A/2500V阳极短路型GTO器件的研制

Development of Type 600 A/2500 V Anode Short Circuit GTO Component

通过最佳的阴极单元结构和阳极短路图形设计，采用改进的Ｇａ扩散工艺、阳极短路结构、掺氯氧化技术及电子辐照技术，研制出了具有优良电特性的ＧＴＯ器件。文章论述了６００Ａ／２５００Ｖ阳极短路型可关断晶闸管（ＧＴＯ）的基本设计原理，给出了器件的工艺特点和主要电参数。

Optimized design of cathode unit structure and anode short circuit, adopting with improved Ga dense technology, anode short circuit structure, chlorine addition oxidation and electronic radiation technology, leads to development of GTO componentwith excellent features. In this article, general design principle of type 600 A/2 500 V-anode short circuit GTO are illustrated, itsprocess features and main electric parameters are pointed.