摘要
报道了ＧａＡｓ声表面波（ＳＡＷ）固定延迟线的设计方法和ＳＡＷ 器件金属剥离制造新工艺．研制出ＧａＡｓ ＳＡＷ 延迟线，典型参数为：中心频率１５８ＭＨｚ，插入损耗低于５５ｄＢ，延迟时间１．５μｓ．
A design method and a new Metal lift\|off manufacture technology of GaAs surface acoustic wave (SAW) fixed\|delay line is given.We have developed the SAW fixed\|delay line on GaAs.Its typical parameters are as follows:the center frequency is 158MHz with the insertion loss of less than 55dB and the delay time is 1 5μs.
