直流激励轴快流CO_2激光器非正常放电研究

Research on Abnormal Discharge of DC Excitation Fast-Flow Axis CO_2 Laser

以NEL-A系列直流激励轴快流CO2激光器为例,研究谐振腔非正常放电问题。通过化学实验的方法验证了谐振腔内主要腐蚀物为碱式碳酸铜,运用物理和化学理论分析了腔内碱式碳酸铜的成因及其影响谐振腔放电的微观机理。实验结果证明,腔内主要腐蚀物碱式碳酸铜是造成激光器谐振腔湍流放电功率下降的主要原因。该结论可作为直流激励轴快流CO2激光器谐振腔和气体单元改进设计的参考,同时也为设备现场维护提供了一条新的途径。

Abnormal discharge of laser resonator is studied by using the NEL-A series high-power fast-flow axis CO2 laser.By chemical experiment,it is verified that the main corrosion of laser resonator is the basic carbonate copper.Based on physics and chemistry theory,the causes of basic carbonate copper and the micro-mechanism of abnormal discharge of laser resonator are analyzed.The testing results show that the basic carbonate copper is the main reason of abnormal discharge.The conclusion can be used as a reference to improve the design of laser resonator and gas supply unit.At the same time,it provides a new way for equipment maintenance on the spot.