摘要
为实现小型化、非接触式、快速高精度的位移测量,设计并搭建了基于光学彩色共焦原理的位移测量系统。系统中数据拟合采用的方法是,对光谱响应函数极值周围的数据进行高斯叠加拟合,以获得光谱响应曲线的峰值,从而得到峰值所对应的波长。经过实验验证,系统的测量范围为2mm,测量精度可以达到10μm,线性度为3.4%,光谱响应的半高宽(FWHM)为49nm。因此能够满足一定精度的位移测量需求。
For realization of miniaturization,non-contact,fast and high precision displacement measurement,a displacement measurement system based on chromatic confocal is designed and built.In order to obtain the peak spectral response curve,and to obtain the wavelength corresponding to the peak,the data fitting method that around the spectral response function of the extreme data points fitted with superimposed Gaussian is used in this measurement system.Experimental results show,the measuring range of system is 2mm,measurement accuracy can reach 10μm,the linearity is 3.4%,and the axial resolution is 50nm,the full width of half maximum(FWHM) of spectral distribution is 39nm.So it can meet needs for the high precision non-contact displacement measurement.
出处
《光学技术》
CAS
CSCD
北大核心
2012年第1期83-88,共6页
Optical Technique
基金
北京市属高等学校人才强教计划资助项目(PHR201107130)
关键词
光学测量
位移测量
彩色共焦
光谱编码
optical measurement
displacement measurement
chromatic confocal
chromatic codification
