半导体及集成电路工艺加工设备的运行管理与技术维护

Management and maintenance of semiconductor processing equipment

本文重点介绍有关半导体及集成电路工业生产及相关科研教学单位中使用的工艺加工设备的日常运行管理与技术维护,内容涉及设备在生产总厂完成最终测试后的现场用户技术检验、设备的安装与调试程序(开箱检验与搬入、连接与安装、硬件调试与验收、工艺调试与验收、特殊工艺调试与验收)、设备在保修期内和保修期之外的技术维护等所有环节。明确给出在上述各时期用户与设备生产厂商双方权力与义务、具体工作内容、各项技术要求及相关管理内容,希望能够对从事与半导体及集成电路工艺加工设备相关工作的广大同行有一参考作用。

The areas of operation management, technology management and technical performance maintenance for semiconductor processing equipment are provided. The key period including the system inspection before shipment, move in and installation, startup, within warranty and without warranty are covered. The obligation and right of both system vendor and customer, main task activities, technical requirement and related operation management are introduced.