基于CAN总线的低温等离子体设备系统

Low Temperature Plasma Equipment System Based on CAN bus

基于CAN(控制器局域网)总线的现代测控技术可以提高低温等离子体设备自动控制的实时性、可靠性和可扩展性。针对典型低温等离子体设备实验平台,通过设计制作的智能节点和带有CAN接口卡的PC机建立起了1个基于CAN总线的低温等离子体设备系统,详细介绍了影响该系统实时性的2个关键问题。实验结果表明,该系统可以稳定可靠工作、可以实现对重要参数的自动稳定控制,驱动频率在20～60 Hz之内,真空度上下波动量为9 Pa.

The modem measurement and control technology based on CAN bus can improve the real-time, reliability and scal- ability of the low temperature plasma equipment automatic controlling. For a typical low temperature plasma equipment experimental platform,a CAN-bus based measurement and control system was established through self-developed smart nodes and a personal computer with a CAN interface card. The two key problems which impact the real time of the system was discussed. The results of experiment shows the system can work stably and reliably, and the important parameters can be controlled stably. The amount of vacuum fluctuations is 9 Pa,when driving frequency is from 20 Hz to 60 Hz.