不同衬底上ZnO:Al透明导电薄膜的性能

Properties of Al-Doped ZnO Thin Films Deposited on Different Substrates

室温下,采用射频磁控溅射法在玻璃和聚对苯二甲酸乙二醇酯(polyethylene terephthalate,PET)上沉积了掺铝的氧化锌(ZnO:Al,AZO)透明导电薄膜。通过X射线衍射仪分析不同衬底上AZO薄膜的结构,采用四探针测试仪及紫外可见光分光光度计测试薄膜的光电性能。结果表明:沉积在两种衬底上的AZO薄膜都具有六方纤锌矿结构,最佳取向均为[002]方向;玻璃衬底和PET衬底上制备的AZO薄膜的方阻分别为19/sq和45/sq,薄膜透光率均高于90%。实验表明,柔性衬底透明导电氧化物薄膜可以代替硬质衬底透明导电薄膜使电子器件向小型化、轻便化方向发展。

Al-doped ZnO（AZO） transparent conductive films on glass and polyethylene terephthalate（PET） were deposited by radio frequency magnetron sputtering at room temperature.The structure of the AZO films deposited on these two substrates was analyzed via X-ray diffraction.The photoelectric properties of the AZO films were measured by four-point probe tester and ultraviolet–visible spectrophotometer.It was indicated that the AZO thin films deposited on these two substrates had a hexagonal wurtzite structure and the highest c-axis orientation.The sheet resistances of the films deposited on glass and PET substrates were 19 Ω/sq and 45 Ω/sq,respectively,and their visible transmittances both were 90%.The result shows that the transparent conductive oxide thin film deposited on flexible substrate can replace the film deposited on rigid substrate,which develops electrical devices towards the minia-turization and portability.