平行板式静电微执行器动态Pull-in现象分析

Analysis of Dynamic Pull-in Phenomena for Parallel-Plate Electrostatic Micro-Actuator

基于求不考虑边缘电容的静电微执行器动态Pull-in参数的能量分析法,并结合边缘电容的模型推导出考虑边缘电容情况下静电微执行器的动态Pull-in参数的计算方法。将不考虑边缘电容条件下的静电微执行器的动态Pull-in参数和考虑边缘电容条件下的静电微执行器的动态Pull-in参数进行比较,得到这两种条件下静电微执行器的动态Pull-in参数的不同以及边缘电容对静电微执行器动态Pull-in参数的影响:考虑边缘电容的Pull-in电压小于不考虑边缘电容的Pull-in电压;在边缘电容模型下,平行板长度的变化对Pull-in电压的影响很大,但是对Pull-in位移却没有影响,平行板宽度的变化对Pull-in电压的影响较小,但是对Pull-in位移的影响很大。

Based on the energy analysis method to obtain dynamic pull-in parameters of the electrostatic micro actuators without considering the fringing capacitance and combined with the fringing capacitance model, the calculated method of dynamic pull-in parameters of the electrostatic micro actuators considering the fringing capacitance was derived. Compared with the dynamic pull-in parameters of the electrostatic micro actuators without considering the fringing capacitance with the dynamic pull-in parameters of the electrostatic micro actuators considering the fringing capacitance, the differences of dynamic pull-in parameters of the electrostatic micro actuators under the two conditions and the influences of fringing capacitance on dynamic pull-in parameters of the electrostatic micro actuators were obtained. The pull-in voltage of considering the fringing capacitance is less than the pull-in voltage without considering the fringing capacitance capacitor; under the fringing capacitance model in the text, changes in the length of parallel-plate have the great influence on the pull-in voltage, but little effect on the pull-in displacement; changes in the width of parallel-plate have a little impact on the pull-in voltage, but a significant influence on the pull-in displacement.